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1

Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF[sub 2] on SiO[sub 2]

Ebm, Christoph, Hobler, Gerhard, Waid, Simon, Wanzenboeck, Heinz D.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 690 KB

english, 2010

2

Focused-ion-beam-inflicted surface amorphization and gallium implantation—new insights and removal by focused-electron-beam-induced etching

Roediger, P, Wanzenboeck, H D, Waid, S, Hochleitner, G, Bertagnolli, E

Journal:

Year:

2011

Language:

english

File:

PDF, 2.58 MB

english, 2011

3

Focused ion beam direct patterning of hardmask layers

Waid, Simon, Wanzenboeck, Heinz D., Muehlberger, Michael, Gavagnin, Marco, Bertagnolli, Emmerich

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2014

Language:

english

File:

PDF, 3.11 MB

english, 2014

4

Dot-array implantation for patterned doping of semiconductors

H.D. Wanzenboeck, C. Ostermaier, A. Gruen, B. Eichinger, M. Karner, E. Bertagnolli

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2006

Language:

english

File:

PDF, 245 KB

english, 2006

5

Bridging the gap—Biocompatibility of microelectronic materials

E. Bogner, K. Dominizi, P. Hagl, E. Bertagnolli, M. Wirth, F. Gabor, W. Brezna, H.D. Wanzenboeck

Journal:

Acta Biomaterialia

Year:

2006

Language:

english

File:

PDF, 369 KB

english, 2006

6

Metal-organic chemical vapor deposition and nanoscale characterization of zirconium oxide thin films

S Harasek, H.D Wanzenboeck, B Basnar, J Smoliner, J Brenner, H Stoeri, E Gornik, E Bertagnolli

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 997 KB

english, 2002

7

Influence of structured wafer surfaces on the characteristics of Caco-2 cells

Iris Guell, Heinz D. Wanzenboeck, Sahar S. Forouzan, Emmerich Bertagnolli, Elisabeth Bogner, Franz Gabor, Michael Wirth

Journal:

Acta Biomaterialia

Year:

2009

Language:

english

File:

PDF, 562 KB

english, 2009

8

Direct-write deposition with a focused electron beam

M. Fischer, H.D. Wanzenboeck, J. Gottsbachner, S. Müller, W. Brezna, M. Schramboeck, E. Bertagnolli

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 139 KB

english, 2006

9

Feeding Response of Perch (Perca fluviatilis) and Roach (Rutilus rutilus) Fry to the Presence of a Predator

V. N. Mikheev, A. F. Pasternak, J. Wanzenboeck

Journal:

Doklady Biological Sciences

Year:

2002

Language:

english

File:

PDF, 76 KB

english, 2002

10

Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition

Gavagnin, Marco, Wanzenboeck, Heinz D., Belić, Domagoj, Bertagnolli, Emmerich

Journal:

Year:

2013

Language:

english

File:

PDF, 516 KB

english, 2013

11

SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Wednesday 13 September 2000)] 20th Annual BACUS Symposium on Photomask Technology - FIB-based local deposition of dielectrics for phase-shift mask modification

Wanzenboeck, Heinz D., Verbeek, Martin, Maurer, Wilhelm, Bertagnolli, Emmerich, Grenon, Brian J., Dao, Giang T.

Year:

2001

Language:

english

File:

PDF, 574 KB

english, 2001

12

Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

Waid, Simon, Wanzenboeck, Heinz D., Muehlberger, Michael, Bertagnolli, Emmerich

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 516 KB

english, 2012

13

Electron-beam deposited SiO[sub 2] investigated by scanning capacitance microscopy

Brezna, W., Fischer, M., Wanzenboeck, H. D., Bertagnolli, E., Smoliner, J.

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 426 KB

english, 2006

14

Electron beam induced deposition of iron nanostructures

Hochleitner, G., Wanzenboeck, H. D., Bertagnolli, E.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2008

Language:

english

File:

PDF, 875 KB

english, 2008

15

Magnetic force microscopy study of shape engineered FEBID iron nanostructures

Gavagnin, Marco, Wanzenboeck, Heinz D., Belic, Domagoj, Shawrav, Mostafa M., Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, Bertagnolli, Emmerich

Journal:

physica status solidi (a)

Year:

2014

Language:

english

File:

PDF, 829 KB

english, 2014

16

[Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies

Blanquart, Timothee, Niinistö, Jaakko, Aslam, Nabeel, Banerjee, Manish, Tomczak, Yoann, Gavagnin, Marco, Longo, Valentino, Puukilainen, Esa, Wanzenboeck, H. D., Kessels, W. M. M., Devi, Anjana, Hoffma

Journal:

Chemistry of Materials

Year:

2013

Language:

english

File:

PDF, 2.61 MB

english, 2013

17

Focused electron beam induced etching of silicon using chlorine

Roediger, P, Hochleitner, G, Bertagnolli, E, Wanzenboeck, H D, Buehler, W

Journal:

Year:

2010

Language:

english

File:

PDF, 1.66 MB

english, 2010

18

Novel method for cleaning a vacuum chamber from hydrocarbon contamination

Wanzenboeck, H. D., Roediger, P., Hochleitner, G., Bertagnolli, E., Buehler, W.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2010

Language:

english

File:

PDF, 1.14 MB

english, 2010

19

Slow trap response of zirconium dioxide thin films on silicon

S. Harasek, A. Lugstein, H. D. Wanzenboeck, E. Bertagnolli

Year:

2003

Language:

english

File:

PDF, 520 KB

english, 2003

20

Compositional and electrical properties of zirconium dioxide thin films chemically deposited on silicon

Harasek, S., Wanzenboeck, H. D., Bertagnolli, E.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2003

Language:

english

File:

PDF, 735 KB

english, 2003

21

Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etching

Roediger, Peter, Wanzenboeck, Heinz D., Hochleitner, Gottfried, Bertagnolli, Emmerich

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 964 KB

english, 2011

22

Mask-free prototyping of metal-oxide-semiconductor devices utilizing focused electron beam induced deposition

Shawrav, Mostafa Moonir, Wanzenboeck, Heinz D., Belic, Domagoj, Gavagnin, Marco, Bethge, Ole, Schinnerl, Markus, Bertagnolli, Emmerich

Journal:

physica status solidi (a)

Year:

2014

Language:

english

File:

PDF, 585 KB

english, 2014

23

Focused Electron Beam-Induced CVD of Iron: a Practical Guide for Direct Writing

Gavagnin, Marco, Wanzenboeck, Heinz D., Shawrav, Mostafa M., Belic, Domagoj, Wachter, Stefan, Waid, Simon, Stoeger-Pollach, Michael, Bertagnolli, Emmerich

Journal:

Chemical Vapor Deposition

Year:

2014

Language:

english

File:

PDF, 746 KB

english, 2014

24

Focused electron beam induced etching of silicon by chlorine gas: Negative effects of residual gas contamination on the etching process

Roediger, P., Wanzenboeck, H. D., Hochleitner, G., Bertagnolli, E., Buehler, W.

Journal:

Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 1.37 MB

english, 2010

25

[IEE Eighth International Conference on Dielectric Materials, Measurements and Applications - Edinburgh, UK (17-21 Sept. 2000)] Eighth International Conference on Dielectric Materials, Measurements and Applications - Ion beam induced deposition of dielectric nanostructures

Wanzenboeck, H.D.

Year:

2000

Language:

english

File:

PDF, 775 KB

english, 2000

26

Electron Beam-Induced CVD of Nanoalloys for Nanoelectronics

Shawrav, Mostafa Moonir, Belić, Domagoj, Gavagnin, Marco, Wachter, Stefan, Schinnerl, Markus, Wanzenboeck, Heinz D., Bertagnolli, Emmerich

Journal:

Chemical Vapor Deposition

Year:

2014

Language:

english

File:

PDF, 986 KB

english, 2014

27

Quantitative simulation of ion-beam induced deposition of nanostructures

Ebm, Christoph, Hobler, Gerhard, Waid, Simon, Wanzenboeck, Heinz D.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 851 KB

english, 2011

28

Free-Standing Magnetic Nanopillars for 3D Nanomagnet Logic

Gavagnin, Marco, Wanzenboeck, Heinz D., Wachter, Stefan, Shawrav, Mostafa M., Persson, Anders, Gunnarsson, Klas, Svedlindh, Peter, Stöger-Pollach, Michael, Bertagnolli, Emmerich

Journal:

ACS Applied Materials & Interfaces

Year:

2014

Language:

english

File:

PDF, 3.65 MB

english, 2014

29

[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Custom-tailored microfluidic devices and nanoscaled actuators - on the fast track

Wanzenboeck, H.D., Fisher, M., Mueller, S., Bertagnolli, E.

Year:

2004

Language:

english

File:

PDF, 421 KB

english, 2004

30

Direct-Write Deposition and Focused-Electron-Beam-Induced Purification of Gold Nanostructures

Belić, Domagoj, Shawrav, Mostafa M., Gavagnin, Marco, Stöger-Pollach, Michael, Wanzenboeck, Heinz D., Bertagnolli, Emmerich

Journal:

ACS Applied Materials & Interfaces

Year:

2015

Language:

english

File:

PDF, 2.12 MB

english, 2015

31

Mapping of local argon impingement on a virtual surface: an insight for gas injection during FEBID

Wanzenboeck, H. D., Hochleitner, G., Mika, J., Shawrav, M. M., Gavagnin, M., Bertagnolli, E.

Journal:

Applied Physics A: Materials Science & Processing

Year:

2014

Language:

english

File:

PDF, 985 KB

english, 2014

32

Zirconium dioxide nanolayer passivated impedimetric sensors for cell-based assays

Sticker, Drago, Rothbauer, Mario, Charwat, Verena, Steinkühler, Jan, Bethge, Ole, Bertagnolli, Emmerich, Wanzenboeck, Heinz D., Ertl, Peter

Journal:

Sensors and Actuators B: Chemical

Year:

2015

Language:

english

File:

PDF, 2.02 MB

english, 2015

33

Generation of 3D nanopatterns with smooth surfaces

Waid, Simon, Wanzenboeck, Heinz D, Muehlberger, Michael, Gavagnin, Marco, Bertagnolli, Emmerich

Journal:

Year:

2014

Language:

english

File:

PDF, 1.27 MB

english, 2014

34

Focused ion beam induced surface amorphization and sputter processes

Basnar, B., Lugstein, A., Wanzenboeck, H., Langfischer, H., Bertagnolli, E., Gornik, E.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2003

Language:

english

File:

PDF, 643 KB

english, 2003

35

Local Modification of Microstructure and of Properties by FIB-CVD

Wanzenboeck, H., Harasek, S., Langfischer, H., Basnar, B., Brezna, W., Smoliner, J., Bertagnolli, E.

Journal:

MRS Proceedings

Year:

2003

Language:

english

File:

PDF, 290 KB

english, 2003

36

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Topographic Effects of Microstructured Biosensors

Wanzenboeck, Heinz D., Forouzan, Sahar, Bertagnolli, Emmerich, Guell, Iris, Wirth, Michael, Gabor, Franz

Year:

2008

Language:

english

File:

PDF, 388 KB

english, 2008

37

Custom design of optical-grade thin films of silicon oxide by direct-write electron-beam-induced deposition

H. D. Wanzenboeck, M. Fischer, R. Svagera, J. Wernisch, E. Bertagnolli

Year:

2006

Language:

english

File:

PDF, 783 KB

english, 2006

38

Nanoimprint lithography stamp modification utilizing focused ion beams

H. D. Wanzenboeck, S. Waid, E. Bertagnolli, M. Muehlberger, I. Bergmair, R. Schoeftner

Year:

2009

Language:

english

File:

PDF, 829 KB

english, 2009

39

Local, direct-write, damage-free thinning of germanium nanowires

P. Roediger, M. Mijic, C. Zeiner, A. Lugstein, H. D. Wanzenboeck, E. Bertagnolli

Year:

2011

Language:

english

File:

PDF, 2.60 MB

english, 2011

40

Focused ion beam induced Ga-contamination—An obstacle for UV-nanoimprint stamp repair?

Waid, Simon, Wanzenboeck, Heinz D., Gavagnin, Marco, Langegger, Ruppert, Muehlberger, Michael, Bertagnolli, Emmerich

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2013

Language:

english

File:

PDF, 4.38 MB

english, 2013

41

Arthroscopic treatment of synovial osteochondromatosis of the elbow. Case report and literature review

Terra, Bernardo Barcellos, Moraes, Eduardo Wanzenboeck, de Souza, Alceuleir Cardoso, Cavatte, José Maria, Teixeira, João Carlos de Medeiros, De Nadai, Anderson

Journal:

Revista Brasileira de Ortopedia (English Edition)

Year:

2015

File:

PDF, 2.72 MB

2015

42

Chlorine based focused electron beam induced etching: A novel way to pattern germanium

Shawrav, M.M., Gökdeniz, Z.G., Wanzenboeck, H.D., Taus, P., Mika, J.K., Waid, S., Bertagnolli, E.

Journal:

Materials Science in Semiconductor Processing

Year:

2015

Language:

english

File:

PDF, 1.18 MB

english, 2015

43

Focused electron beam induced deposition of gold catalyst templates for Si-nanowire synthesis

Hochleitner, Gottfried, Steinmair, Mathias, Lugstein, Alois, Roediger, Peter, Wanzenboeck, Heinz D, Bertagnolli, Emmerich

Journal:

Year:

2011

Language:

english

File:

PDF, 800 KB

english, 2011

44

FIB-TEM Characterization of Locally Restricted Implantation Damage

Wanzenboeck, Heinz D., Harasek, Stefan, Brezna, Wolfgang, Lugstein, Alois, Langfischer, Helmut, Bertagnolli, Emmerich, Grabner, Ulf, Hammer, Gerold, Pongratz, Peter

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 632 KB

english, 2002

45

Ion Beam Induced Chemical Vapor Deposition of Dielectric Materials

Wanzenboeck, H.D., Lugstein, A., Langfischer, H., Bertagnolli, E., Gritsch, M., Hutter, H.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 1.79 MB

english, 2000

46

Effects of Ga-Irradiation On Properties of Materials Processed by A Focused Ion Beam (FIB)

Wanzenboeck, H. D., Langfischer, H., Lugstein, A., Bertagnolli, E., Grabner, U., Pongratz, P., Basnar, B., Smoliner, J., Gornik, E.

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 305 KB

english, 2000

47

Ultrathin Zirconium Dioxide Chemically Deposited at a Low Thermal Budget

Harasek, Stefan, Wanzenboeck, Heinz D., Langfischer, Helmut, Bertagnolli, Emmerich

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 280 KB

english, 2002

48

Deposition Mechanism of Oxide Thin Films Manufactured by a Focused Energetic Beam Process

Wanzenboeck, H.D., Harasek, S., Langfischer, H., Bertagnolli, E.

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 1.01 MB

english, 2002

49

Versatile Nanodeposition of Dielectrics and Metals by Non-contact Direct-Write Technology

Wanzenboeck, H. D., Langfischer, H., Harasek, S., Basnar, B., Hutter, H., Bertagnolli, E.

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 2.03 MB

english, 2002

50

Time Resolved Studies of Focused Ion Beam Induced Tungsten Deposition

Langfischer, H., Harasek, S., Wanzenboeck, H. D., Basnar, B., Bertagnolli, E.

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 434 KB

english, 2002